Bowman Industry

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GAS FLOW CONTROLLERS

The BI-3000 series of Gas Mass Flow Controllers and the BI-4000 series of Gas Volumetric Flow Controllers provide +/-1% full scale accuracy and 0.5% precision, controlling all traditional inert gases and most aggressive gases.

Bowman Industry and Manufacturing’s Flow Controllers use advanced materials, pressure based sensors with unique and wide ranging LFE (laminar flow element) assemblies and embedded proportional valves. The BI-3000 series of flow controllers ranges from less than 2 sccm (standard cubic centimeters per minute) mass flow to 30 SLPM (Standard Liters per Minute). The BI-4000 series of flow controllers ranges from less than 2 ccm (cubic centimeters per minute) to 30 LPM (Liters per Minute). Both can re re-ranged in the field or by the factory (See Re-ranging).

Pressure based MFCs (Mass Flow Controllers) are often considered superior in many applications because sensor drift, back pressure immunity and accuracy errors due to temperature excursions are mostly eliminated. Pressure based MFCs are also known to be 'faster' to respond and stabilize to a change in flow set point.

BI-3000 Gas Mass Flow Controllers

BI-4000 Gas Volume Flow Controllers

Bowman Industry
2200 N. Wilmot Road
Tucson, Arizona 85712