
Mass Flow Controllers (MFCs) are often considered the “Gold Standard” for precise control of gas used in R&D laboratories, semiconductor and pharmaceutical manufacturing, automotive and industrial process control, fuel cell, energy, and environmental monitoring. The use of thermal sensors to determine mass flow of gas along with integration of a proportional valve for control has traditionally been the most used approach, but the advent of reliable pressure sensors to gather mass flow information has addressed weaknesses of the thermal sensor in application. Slow response time, sensor drift due to chimney effects and oxidation, back pressures affecting the accuracy of the thermal sensor, and the frequent need to recalibrate are largely overcome in a pressure based mass flow controller. Pressure based mass flow controllers (MFCs) usually have a much wider range of operation than thermal types.
The BI-3000 Gas Mass Flow Controller embodies with innovation the best features of pressure based laminar gas mass flow controller (MFC) technology. Wet or dry gas-stream metering, very wide ranging, pressure and mass information, low drift and infrequent calibration, gas selectability, back pressure immunity and high precision are standards of excellence and performance. Unique in the industry, the BI-3000 series gas mass flow controllers are immune to the effect of most wet and corrosive gasses and also exhibit very low “dead volumes” associated with other pressure based mass flow control technologies.
Go to BI-3000 Specification Page
Go to BI-3000 How to Order Page
FEATURES of the BI-3000 Gas Mass Flow Controller:
- Corroperm™ product protection from aggressive and/or “wet gases”
- Very low and precise flow control under 2 sccm
- Real time flow sensing in less than 50ms
- Control equilibrium in 250ms
- Set point command: local, remote or PC
- Internal PID and/or external PID tuning
- Panel mount models
- Flow Totalizer
- Streaming RS-232 data for mass flow, volumetric flow, totalized flow, system pressure, temperature and set point
- Field gas type selection
- Field flow rate re-ranging and orifice/laminar flow element substitution
- Can be serviced in-line
- Programmable alarms and relay
- Multiple outputs-analog and digital proportional to mass flow
- Touch screen user interface-menu driven
- Clear, bright, adjustable contrast, indicating display